ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process
Venkatesh, Rajaraman Prasanna, Kim, Hyuk Min, Ramanathan, Srinivasan, Park, Jin-GooYear:
2011
Language:
english
DOI:
10.1149/1.3630860
File:
PDF, 1.29 MB
english, 2011