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Ultramicrohardness Measurement of Silicon Nitride Films
Cai, X., Wang, Jian Fei, Zhou, P.N., Liu, X.H., Zhen, Z.H.Volume:
89-91
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.89-91.547
Date:
August, 1993
File:
PDF, 336 KB
1993