Ultramicrohardness Measurement of Silicon Nitride Films

Key Engineering Materials 1993 / 8 Vol. 89-91

Ultramicrohardness Measurement of Silicon Nitride Films

Cai, X., Wang, Jian Fei, Zhou, P.N., Liu, X.H., Zhen, Z.H.
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Volume:
89-91
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.89-91.547
Date:
August, 1993
File:
PDF, 336 KB
1993
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