Gettering of Copper and Iron to Extended Surface Defects in...

Materials Science Forum 1992 Vol. 83-87

Gettering of Copper and Iron to Extended Surface Defects in Silicon

de Coteau, M.D., Wilshaw, Peter R., Falster, Robert
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Volume:
83-87
Year:
1992
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.83-87.185
File:
PDF, 731 KB
1992
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