Real Time Optical Method of Stress Measurements in Thin...

Real Time Optical Method of Stress Measurements in Thin Films

Moulard, G., Contoux, G., Motyl, G., Courbon, M.
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Volume:
287-288
Year:
1998
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.287-288.141
File:
PDF, 426 KB
english, 1998
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