Fabrication of Thick Silicon Nitride Substrates by Tape...

Key Engineering Materials 2008 Vol. 368-372

Fabrication of Thick Silicon Nitride Substrates by Tape Casting

Ma, Si Hua, Ning, Xiao Shan, Fu, Teng, Zhou, He Ping, Chen, Ke Xin
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Volume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.875
File:
PDF, 303 KB
english, 2008
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