Room Temperature Implantation and Activation Kinetics of...

Materials Science Forum 2004 Vol. 457-460

Room Temperature Implantation and Activation Kinetics of Nitrogen and Phosphorus in 4H-SiC Crystals

Blanqué, Servane, Pérez, R., Godignon, Phillippe, Mestres, Narcis, Morvan, Erwan, Kerlain, Alexandre, Dua, Christian, Brylinski, C., Zielinski, Marcin, Camassel, Jean
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.893
File:
PDF, 566 KB
english, 2004
Conversion to is in progress
Conversion to is failed