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Extracting Activation and Compensation Ratio from Aluminum Implanted 4H-SiC by Modeling of Resistivity Measurements
Rambach, Martin, Frey, Lothar, Bauer, Anton J., Ryssel, HeinerVolume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.827
File:
PDF, 293 KB
english, 2006