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Investigation of Fired and Non-fired Si-SiNx Interface Properties by Deep-level Transient Spectroscopy measurements
Gong, Chun, Simoen, Eddy, Yang, Rui, Posthuma, Niels, Van Kerschaver, Emmanuel, Poortmans, Jef, Mertens, RobertVolume:
1210
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1210-Q05-04
Date:
January, 2009
File:
PDF, 278 KB
english, 2009