A piezoresistive microcantilever array for surface stress measurement: curvature model and fabrication
Choudhury, Arnab, Hesketh, Peter J, Thundat, Thomas, Hu, ZhiyuVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/019
Date:
October, 2007
File:
PDF, 1.90 MB
english, 2007