Periodically Lateral Silicon Grains Fabricated by Excimer Laser Irradiation with a-Si Spacers for LTPS TFTs
Cheng, Huang-Chung, Tsai, Chun-Chien, Lu, Jian-Hao, Chen, Hsu-Hsin, Chen, Bo-Ting, Chang, Ting-Kuo, Lin, Ching-WeiVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2382420
File:
PDF, 969 KB
english, 2007