Edge Isolation Using Ultra-Short Pulse Laser Materials with a Top-Hat Beam Profile
Sedao, Xxx, Sarnet, Thierry, Hernandez, José Luis, Schulz Ruhtenbuerg, Malte, Krantz, StephanVolume:
321
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.321.234
Date:
August, 2011
File:
PDF, 1.73 MB
english, 2011