Formation of Carbon Nitride Films by Means of Ion Assisted...

Formation of Carbon Nitride Films by Means of Ion Assisted Dynamic Mixing (IVD) Method

Fujimoto, Fuminori, Ogata, Kiyoshi
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L420
Date:
March, 1993
File:
PDF, 536 KB
1993
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