Effect of the Bottom Electrode Contact (BEC) on the phase...

MRS Proceedings 2004 / 1 Vol. 830

Effect of the Bottom Electrode Contact (BEC) on the phase transformation of N2 doped Ge2Sb2Te 5 (N-GST) in a Phase-change Random Access Memory

Lee, Suyoun, Song, Y. J., Hwang, Y. N., Lee, S. H., Park, J. H., Ryoo, K. C., Ahn, S. J., Jeong, C. W., Oh, J. H., Shin, J. M., Yeung, F., Jeong, W. C., Kim, Y. T., Park, J. B., Koh, K. H., Jeong, G.
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Volume:
830
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-830-D7.9
Date:
January, 2004
File:
PDF, 224 KB
english, 2004
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