Effects of oxygen-gas flow rate on lattice dynamics and...

Effects of oxygen-gas flow rate on lattice dynamics and microstructure for Ga-doped ZnO thin films prepared by reactive plasma deposition

T. Yamamoto, T. Mitsunaga, M. Osada, K. Ikeda, S. Kishimoto, K. Awai, H. Makino, T. Yamada, T. Sakemi, S. Shirakata
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Volume:
38
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.spmi.2005.08.007
File:
PDF, 662 KB
english, 2005
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