Fabrication of Nitrided Mask on GaAs surface and Its...

MRS Proceedings 2005 / 1 Vol. 891

Fabrication of Nitrided Mask on GaAs surface and Its Machinability for STM lithography

Yamamoto, Yo, MATSUOKA, Sota, Kondo, Toshiyuki, Maruyama, Takahiro, Naritsuka, Shigeya

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Volume:

891

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-0891-EE03-23

Date:

January, 2005

File:

PDF, 1.07 MB

english, 2005

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