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Performance and characteristics of imprint mould fabricated by liquid-phase deposition
Ji Hye Lee, Kyoung Seob Kim, Byoung Kyu Lee, Nam-Hoon Kim, Yonghan RohVolume:
44
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.spmi.2007.10.008
File:
PDF, 997 KB
english, 2008