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Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing
J. Grisolia, C. Dumas, G. Ben Assayag, C. Bonafos, S. Schamm, A. Arbouet, V. Paillard, M.A.F. van den Boogaart, J. Brugger, P. NormandVolume:
44
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.spmi.2007.12.013
File:
PDF, 889 KB
english, 2008