Low-temperature direct wafer bonding of GaAs/InP

Superlattices and Microstructures 2009 Vol. 45; Iss. 2

Low-temperature direct wafer bonding of GaAs/InP

Sheng Xie, Songyan Chen, Weilian Guo, Luhong Mao
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Volume:
45
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.spmi.2008.12.008
File:
PDF, 917 KB
english, 2009
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