A Comparative Study on the Activation Behavior of Implanted Boron and Phosphorus for LTPS Using Solid-Phase Crystallization
Li, Qinglong, Mudgal, Tarun, Meller, Patricia M., Slavin, Seth, Manley, Robert G., Hirschman, Karl D.Volume:
1426
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1311
Date:
January, 2012
File:
PDF, 215 KB
english, 2012