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Phenomenological Model of Non-Evaporated Getter for Micro-electromechanical Systems (MEMS) Applications
Kondoleon, Caroline A., Marinis, Thomas F.Volume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-657-ee6.4
Date:
January, 2000
File:
PDF, 249 KB
english, 2000