Layer Transfer of Hydrogen-Implanted Silicon Wafers by...

MRS Proceedings 2006 / 1 Vol. 913

Layer Transfer of Hydrogen-Implanted Silicon Wafers by Thermal-Microwave Co-Activation

Yang, Y. Y., Huang, C. H., Hsu, Y. -K., Jeng, S. -J., Tai, C. -C., Lee, S., Chen, H. -W., Gan, Q., Chu, C. -S., Ting, J. -H., Lai, C. S., Lee, T. -H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
913
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-0913-d03-13
Date:
January, 2006
File:
PDF, 113 KB
english, 2006
Conversion to is in progress
Conversion to is failed