Development of 3C-SiC SOI Structures using Si on...

Materials Science Forum 2004 Vol. 457-460

Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates

Myers-Ward, Rachael L., Saddow, Stephen E., Rao, Shailaja P., Hobart, Karl D., Fatemi, M., Kub, Francis J.
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Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.1511
File:
PDF, 2.44 MB
english, 2004
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