![](/img/cover-not-exists.png)
ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Dry Etch Process Effects on Cu/low-k Dielectric Reliability for Advanced CMOS Technologies
Zhou, Jun-Qing, Sun, Wu, Zhang, Hai-Yang, Hu, Min-Da, Li, Fan, Song, Xing-Hua, Chang, Shih-Mou, Lee, Kwok-FungYear:
2011
Language:
english
DOI:
10.1149/1.3567600
File:
PDF, 692 KB
english, 2011