Nano-Surface Modification of Silicon with Ultra-Short Pulse...

Key Engineering Materials 2011 / 2 Vol. 470

Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Setsuhara, Yuichi, Hashida, Masaki
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Volume:
470
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.470.117
Date:
February, 2011
File:
PDF, 1.60 MB
english, 2011
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