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Profiling of the Mechanical Properties of Ultralow- k Films Using Nanoindentation Techniques
Geisler, Holm, Mayer, Ulrich, Lehr, Matthias U., Hofmann, Petra, Engelmann, Hans-JuergenVolume:
1297
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.661
Date:
January, 2011
File:
PDF, 384 KB
english, 2011