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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Ultra-Shallow Junction Formation by Plasma doping and Excimer Laser Annealing
Jung, Lak-Myung, Do, Seung-Woo, Kim, Jae-Min, Kong, Seong Ho, Nam, Ki-Hong, Lee, Yong-HyunYear:
2009
Language:
english
DOI:
10.1149/1.3118934
File:
PDF, 552 KB
english, 2009