Optical study of implantation damage recovery from...

Optical study of implantation damage recovery from Si-implanted GaN

James A. Fellows, Y.K. Yeo, Mee-Yi Ryu, R.L. Hengehold
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Volume:
133
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.ssc.2004.11.009
File:
PDF, 157 KB
english, 2005
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