Structural Elements of Ultrashallow Thermal Donors Formed...

Japanese Journal of Applied Physics 2010 / 5 Vol. 49; Iss. 5

Structural Elements of Ultrashallow Thermal Donors Formed in Silicon Crystals

Hara, Akito, Awano, Teruyoshi, Ohno, Yutaka, Yonenaga, Ichiro
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.050203
Date:
May, 2010
File:
PDF, 188 KB
english, 2010
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