Low-Temperature Selective Growth of Heteroepitaxial α-Al2O3...

MRS Proceedings 2008 / 1 Vol. 1150

Low-Temperature Selective Growth of Heteroepitaxial α-Al2O3 Thin Films on a NiO Layer by the Electron-Beam Assisted PLD Process

Hosaka, Makoto, Akita, Yasuyuki, Sugimoto, Yuki, Kato, Yushi, Ono, Yusaburo, Matsuda, Akifumi, Koyama, Koji, Yoshimoto, Mamoru
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Volume:
1150
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1150-RR04-04
Date:
January, 2008
File:
PDF, 364 KB
english, 2008
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