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ECS Transactions [ECS 26th Symposium on Microelectronics Technology and Devices (SBMicro 2011) - Joao Pessoa, Brazil (August 30 - September 2, 2011)] - Morphological and Chemical Analysis of Silicon Etched by SF
Wakawaiachi, Shirley M., Tezani, Leandro L., Pessoa, Rodrigo S., Medeiros, Henrique S., Maciel, Homero S., Petraconi, GilbertoYear:
2011
Language:
english
DOI:
10.1149/1.3615220
File:
PDF, 288 KB
english, 2011