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Silicon cleaning and defect passivation effects of hydrogen cyanide aqueous solutions
Masao Takahashi, Yueh-Ling Liu, Naozumi Fujiwara, Hitoo Iwasa, Hikaru KobayashiVolume:
137
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.ssc.2005.11.027
File:
PDF, 173 KB
english, 2006