![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Nanoepitaxy: Materials and Devices IV - Novel optical properties of Ag films deposited by plasma enhanced atomic layer deposition (PEALD)
Prokes, S. M., Glembocki, O. J., Cleveland, E., Kobayashi, Nobuhiko P., Talin, A. Alec, Islam, M. SaifVolume:
8467
Year:
2012
Language:
english
DOI:
10.1117/12.970437
File:
PDF, 705 KB
english, 2012