SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Structural study of ZrO2 and HfO2 thin films grown by atomic layer deposition
Niilisk, Ahti, Aarik, Jaan, Uustare, Teet, Mändar, Hugo, Tkachev, Sergey, Manghnani, Murli, Rosental, ArnoldYear:
2012
Language:
english
DOI:
10.1117/12.639159
File:
PDF, 400 KB
english, 2012