Two Paths of Oxide Precipitate Nucleation in Silicon

Solid State Phenomena 2008 Vol. 131-133

Two Paths of Oxide Precipitate Nucleation in Silicon

Kissinger, G., Dabrowski, J., Sattler, Andreas, Müller, Timo, von Ammon, Wilfried
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Volume:
131-133
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.131-133.293
File:
PDF, 538 KB
english, 2008
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