Morphological Characterization of Polysilicon Films...

Solid State Phenomena 2001 Vol. 80-81

Morphological Characterization of Polysilicon Films Laser-Annealed in Argon Ambient

Helen, Youri, Gautier, G., Mourgues, K., Raoult, F., Mohammed-Brahim, T., Rogel, R., Bonnaud, O., Prat, C., Lemoine, D.
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Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.175
File:
PDF, 436 KB
2001
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