Effect of native oxides on the elasticity of a silicon...

Effect of native oxides on the elasticity of a silicon nano-scale beam

Jing Wang, Qing-An Huang, Hong Yu
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Volume:
145
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.ssc.2007.12.002
File:
PDF, 475 KB
english, 2008
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