Phase Control and Stability of Thin Silicon Films Deposited from Silane Diluted with Hydrogen
van Elzakker, Gijs, Šutta, Pavol, Tichelaar, Frans D., Zeman, MiroVolume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A08-01
Date:
January, 2007
File:
PDF, 131 KB
english, 2007