Phase Control and Stability of Thin Silicon Films Deposited...

Phase Control and Stability of Thin Silicon Films Deposited from Silane Diluted with Hydrogen

van Elzakker, Gijs, Šutta, Pavol, Tichelaar, Frans D., Zeman, Miro
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Volume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A08-01
Date:
January, 2007
File:
PDF, 131 KB
english, 2007
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