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Nucleation and Growth of Cvd Polycrystalline Si3N4 Films at Low Temperatures
Lauten, Frederick S., Rankin, Janet, Sheldon, Brian W.Volume:
287
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-287-315
Date:
January, 1992
File:
PDF, 1.42 MB
english, 1992