Characterizations of Boron Carbon Nitride and Boron Carbide Films Synthesized by PECVD
Wu, Qingguo, Sriram, Mandyam, Sims, Jim, Fu, Haiying, Varadarajan, Sesha, Archer, Tim, Trujillo, Nathan J., Gleason, Karen K.Volume:
1108
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1108-A09-28
Date:
January, 2008
File:
PDF, 177 KB
english, 2008