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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Assessing Various Analytical Techniques with Different Lateral Resolution by Investigating Spin-coated Inorganic Contamination on Si Wafer Surfaces
Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvatore, Cazzini, Elena, Bersani, Massimo, Gennaro, SalvatYear:
2009
Language:
english
DOI:
10.1149/1.3204421
File:
PDF, 998 KB
english, 2009