![](/img/cover-not-exists.png)
[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - Second Generation Copper Dielectric Barrier (BLOk II): k Reduction and Interface Control To Improve TDDB and EM
Xia, Li-Qun, Zubkov, Vladimir, Ye, Weifeng, Shek, Mei-Yee, Cui, David, Naik, MehulYear:
2009
Language:
english
DOI:
10.1149/1.3096507
File:
PDF, 471 KB
english, 2009