Surface Roughness Scrutinizaton with RIE CF4+Argon Gaseous...

Applied Mechanics and Materials 2014 / 1 Vol. 487

Surface Roughness Scrutinizaton with RIE CF4+Argon Gaseous on Platinum Deposited Wafer

Sauli, Zaliman, Retnasamy, Vithyacharan, Yeow, Aaron Koay Terr, Chui, Goh Siew, Anwar, K., Abdullah, Nooraihan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
487
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.487.71
Date:
January, 2014
File:
PDF, 323 KB
english, 2014
Conversion to is in progress
Conversion to is failed