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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Selective adhesive bonding with SU-8 for zero-level-packaging
Reuter, Danny S., Bertz, Andreas, Schwenzer, Gunther, Gessner, Thomas, Chiao, Jung-Chih, Jamieson, David N., Faraone, Lorenzo, Dzurak, Andrew S.Volume:
5650
Year:
2005
Language:
english
DOI:
10.1117/12.581829
File:
PDF, 329 KB
english, 2005