Influence of Passivation Oxide Properties on SiC...

Materials Science Forum 2009 Vol. 600-603

Influence of Passivation Oxide Properties on SiC Field-Plated Buried Gate MESFETs

Nilsson, Per Åke, Sudow, Mattias, Allerstam, Fredrik, Andersson, Kristoffer, Sveinbjörnsson, Einar Ö., Hjelmgren, Hans, Rorsman, Niklas
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.1103
File:
PDF, 370 KB
english, 2009
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