![](/img/cover-not-exists.png)
Low-Pressure Chemical Vapor Deposition of Semi-Insulating Polycrystalline Silicon (SIPOS) and its Analysis: Application to Power Diode Passivation
Ferreira, E.S., Morimoto, N.I.Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.391
File:
PDF, 371 KB
2001