[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Sc Addition In HfO2 Thin Films Prepared By Liquid-injection MOCVD
Brize, Virginie, Terrenoir, Frédéric, Matko, Igor, Rochat, Nevine, Holländer, Bernhard, Feist, B., Blasco, Nicolas, Dubourdieu, CatherineVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911495
File:
PDF, 684 KB
english, 2008