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Periodic silicon nanocone arrays with controllable dimensions prepared by two-step etching using nanosphere lithography and solution
Mingfei Yang, HongYu Yu, Xiaowei Sun, Junshuai Li, Xiaocheng Li, Lin Ke, Junhui Hu, Fei Wang, Zhihui JiaoVolume:
151
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.ssc.2010.11.007
File:
PDF, 917 KB
english, 2011