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A Laterally Resolved DLTS Study of Intrinsic Defect Diffusion in 4H-SiC after Low Energy Focused Proton Beam Irradiation
Løvlie, Lars, Vines, Lasse, Svensson, Bengt G.Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.431
Date:
April, 2010
File:
PDF, 562 KB
english, 2010