Effect of Resident Stress on the Aberration Correction Ability of MEMS Spatial Light Modulator
Hu, Fang Rong, Qian, Yi Xian, Niu, Jun Hao, Zhang, Li Juan, Nie, KunVolume:
317-319
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.317-319.1677
Date:
August, 2011
File:
PDF, 462 KB
english, 2011