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Effect of hydrogen-ion energy on structure of a-Si:H thin films prepared by ion-beam-assisted sputtering
Huang, Junjun, Wang, Weiyan, Fang, Xuyang, Huang, Jinhua, Tan, Ruiqin, Song, WeijieVolume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-2998-z
Date:
July, 2015
File:
PDF, 531 KB
english, 2015